Review—Semiconductor Materials and Devices for Gas Sensors
نویسندگان
چکیده
Gas sensors are frequently used for detecting toxic gases and vapors environmental control, industrial monitoring household safety. Semiconductor conductivity can be modified by doping or fine-tuned applying an electric magnetic field in ultra-wide range (10 −7 S cm −1 to 10 2 ). The conduction of semiconductor is significantly raised reduced upon the exposure external conditions, such as temperature variation, light, heat, mechanical stress chemicals. Thus, semiconductors excellent materials device structures critical sensing performance. commonly include Si, Ge, III–V, metal oxide semiconductors. Recently carbon-based gain signification attention due their unique electrical, optical properties. There two major gas sensors: resistor-based FET-based sensors. In this review, materials, sensor structure well mechanisms will systematically categorized, described explored, with focus on oxides, GaN, SiC, 2D-TMD recent progress new thoroughly reviewed summarized, a hope show trend technology.
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ژورنال
عنوان ژورنال: Journal of The Electrochemical Society
سال: 2022
ISSN: ['0013-4651', '1945-7111']
DOI: https://doi.org/10.1149/1945-7111/ac6e0a